Hi IRStuff,
Basically lets say that I have a new process that I am trying to compare its particle performance with my existing process. THe existing process seems to show intermittent particle failure that is very hard to determine its rate. How do I determine whether the sample size that I am...
I have been planning to conduct an experiment to compare a particle performance on our CVD chamber between a new and old process. But the problem is that the particle event is random and unpredictable, how do we I determine the optimum sample size for this kind of evaluation
Is there any Insitu Particle Monitoring available for Low Vacuum Pressure process?So far I haven't encounter any company offering this type of solution. Most of the ISPM can only be use for high pressure process
