I know when dealing with a load lock type situation where you are constantly cycle pumping, if you do not pump appropriately there can be an adiabatic cooling effect which may contaminate your (semiconductor or solar) wafers.
Is there any known literature about the trends or limits of this...
I'm trying to design a very basic load lock system and I'm trying to research possible vacuum accumulator sizes that I can pair with it.
Does anyone know of a source or cite that has information on vacuum accumulators or buffers?
Thanks in advance
