Runt0312
Mechanical
- Feb 2, 2009
- 2
I know when dealing with a load lock type situation where you are constantly cycle pumping, if you do not pump appropriately there can be an adiabatic cooling effect which may contaminate your (semiconductor or solar) wafers.
Is there any known literature about the trends or limits of this phenomenon? Can I do a fast pump down a few times and still get all the moisture out? Or must I have a slow pump in the beginning to eliminate all moisture before I fast pump? Or does the pump time not really matter too much and I just need to heat the walls?
I am having a hard time finding information for this, and if anyone either in the semi industry or in solar knows a text, website or just tell me the limits on what I can do, I'd really appreciate it.
Is there any known literature about the trends or limits of this phenomenon? Can I do a fast pump down a few times and still get all the moisture out? Or must I have a slow pump in the beginning to eliminate all moisture before I fast pump? Or does the pump time not really matter too much and I just need to heat the walls?
I am having a hard time finding information for this, and if anyone either in the semi industry or in solar knows a text, website or just tell me the limits on what I can do, I'd really appreciate it.