Analysis problem of meander inductor

[dadara]

If somebody can help mi please do.
I have a problem doing analysis of meander line on Si substrate.Substrate is 760x760 micrometer, and 400micrometer hight.On top of it there is SiO2 layer of 5 micrometer of thickness, and then gos meander line whosw with is 40 micrometer and thisknes is 8 nicrometer.I cant get good S parameters wich I then use to get Q an L.
I'd tried over fifty diferent combinations of excitations and boundary conditions without succession.
Here goes my comand metod example (on this structure I'd tried those combinations)


!-------- COMAND METOD------------
/prep7
/units,SI
tunif,25
! --- define elements and materials ---
epsr_SiO2=3.9
epsr_Si=11.9

et,11,200,7
et,1,120,1,,,0 !normal element
et,2,120,1,,,1 !PML element

! svojstva vazduha
mp,murx,1,1.
mp,perx,1,1.

! svojstva bakra
mp,murx,2,1.
mp,perx,2,1.
mp,rsvx,2,1.724e-8

! svojstva SiO2
mp,murx,3,1
mp,perx,3,epsr_SiO2
mp,rsvx,3,1e12


! svojstva Si
mp,murx,4,1.
mp,perx,4,epsr_Si
mp,rsvx,4,0.1


! --- set up geometry ---
LOCAL, 11, 0, 0, 0, 0, 0, 90 !lokalni sistem
wpcsys, , 11 !na ovaj nacin je struktura u globalnom sistemu definisana u XZ ravni

s=40
krak=120
str=160
vazd=2000
cu=8
sio2=-5
si=-400
pml=8000

*dim,_a,array,10
*dim,_b,array,22
_a(1)=-380
_a(2)=_a(1)+str
_a(3)=_a(2)+s
_a(4)=_a(3)+s
_a(5)=_a(4)+krak
_a(6)=_a(5)+s
_a(7)=_a(6)+krak
_a(8)=_a(7)+s
_a(9)=_a(8)+s
_a(10)=_a(9)+str

_b(1)=-8240
_b(2)=_b(1)+pml
_b(3)=_b(2)+krak
_b(4)=_b(3)+krak
_b(5)=_b(4)+krak
*do,_i,6,16,2
_b(_i)=_b(_i-1)+s
_b(_i+1)=_b(_i)+s
*enddo
_b(18)=_b(17)+s
_b(19)=_b(18)+krak
_b(20)=_b(19)+krak
_b(21)=_b(20)+krak
_b(22)=_b(21)+pml
*do,_i,1,9
*do,_j,1,21
rect,_a(_i),_a(_i+1),_b(_j),_b(_j+1)
*enddo
aglue,all
numcmp,area
*enddo
aglue,all

! slijedi selekovanje povrsine meandarske trake i okoline i pravljenje komponenti
*do,_i,1,9
a=_i
*if,a,EQ,2,then
asel,none
asel, a, area, , (a)*21+7, (a)*21+9,1
asel, a, area, , (a)*21+11, (a)*21+13,1
asel, a, area, , (a)*21+15, (a)*21+17,1
cm,traka,area
*elseif,a,EQ,3,then
asel,none
cmsel,a, traka
asel,a, area, , (a)*21+7, (a)*21+9,2
asel,a, area, , (a)*21+11, (a)*21+13,2
asel,a, area, , (a)*21+15, (a)*21+17,2
cm,traka,area
*elseif,a,EQ,4,then
asel,none
cmsel,a, traka
asel,a, area, , (a)*21+1, (a+1)*21,1
asel,u, area, , a*21+6, a*21+16,2
cm,traka,area
*elseif,a,EQ,5,then
asel,none
cmsel,a, traka
asel,a, area, , (a)*21+5, (a)*21+7,2
asel,a, area, , (a)*21+9, (a)*21+11,2
asel,a, area, , (a)*21+13, (a)*21+15,2
cm,traka,area
*elseif,a,EQ,6,then
asel,none
cmsel,a, traka
asel,a, area, , (a)*21+5, (a)*21+7,1
asel,a, area, , (a)*21+9, (a)*21+11,1
asel,a, area, , (a)*21+13, (a)*21+15,1
cm,traka,area
*endif

*enddo
cmsel,s, traka ! komponenta od povrsina meandarske trake
asel, inve
cm,oko_trake,area ! komponenta od povrsina oko meandarske trake

csys,0
alls














! podesavanje dimenzija elemenata
alls
LESIZE, all, 40, , , , 1

lsel,r,loc,z,(_b(1)+_b(2))*0.5
lsel,a,loc,z,(_b(21)+_b(22))*0.5
LESIZE, all, , , 4, , 1 ! PML

alls
lsel,r,loc,z,(_b(2)+_b(3))*0.5
lsel,a,loc,z,(_b(3)+_b(4))*0.5
lsel,a,loc,z,(_b(4)+_b(5))*0.5
lsel,a,loc,z,(_b(18)+_b(19))*0.5
lsel,a,loc,z,(_b(19)+_b(20))*0.5
lsel,a,loc,z,(_b(20)+_b(21))*0.5
LESIZE, all, , , 3, , 1 ! izmedju PML i prvih stubova meandra
lsel,u,loc,z,_b(4),_b(19)
lsel,u,loc,x,_a(5),_a(6)
LESIZE, all, , , 1, , 1 ! izmedju PML i prvih stubova meandra


alls
lsel,r,loc,x,(_a(1)+_a(2))*0.5
lsel,a,loc,x,(_a(9)+_a(10))*0.5
LESIZE, all, , , 3, , 1 ! sa strana meandra
lsel,u,loc,z,_b(5),_b(18)
LESIZE, all, , , 1, , 1 ! sa strana meandra prema PML

alls
lsel,r,loc,x,(_a(2)+_a(3))*0.5
lsel,a,loc,x,(_a(7)+_a(8))*0.5
LESIZE, all, , , 3, , 1 ! sa strana meandra
lsel,u,loc,z,_b(7),_b(17)
LESIZE, all, , , 1, , 1 ! sa strana meandra prema PML

alls
lsel,r,loc,x,(_a(5)+_a(6))*0.5
lsel,u,loc,z,_b(6),_b(17)
LESIZE, all, , , 4, , 1 ! po sirini meandra

alls
lsel,r,loc,z,(_b(5)+_b(6))*0.5
lsel,r,loc,x,_a(6),_a(10)
LESIZE, all, , , 4, , 1
lsel,r,loc,x,_a(8),_a(10)
LESIZE, all, , , 2, , 1 ! prvi polu-stub sirina meandra

alls
lsel,r,loc,z,(_b(17)+_b(18))*0.5
lsel,r,loc,x,_a(1),_a(5)
LESIZE, all, , , 2, , 1
lsel,r,loc,x,_a(4),_a(5)
LESIZE, all, , , 4, , 1 ! drugi polu-stub sirina meandra

alls
lsel,none
*do,j,8,16,4
lsel,a,loc,z,_b(j)
lsel,a,loc,z,_b(j+1)
*enddo
lsel,r,loc,x,(_a(3)+_a(4))*0.5
LESIZE, all, , , 4, , 1 !desna strana stubova, sirina meandra
lsel,none
*do,j,6,14,4
lsel,a,loc,z,_b(j)
lsel,a,loc,z,_b(j+1)
*enddo
lsel,r,loc,x,(_a(7)+_a(8))*0.5
LESIZE, all, , , 4, , 1 !lijeva strana stubova, sirina meandra

alls
lsel,none
*do, i,7,16,2
lsel,a,loc,z,(_b(i)+_b(i+1))*0.5
*enddo
lsel,r,loc,x,_a(4),_a(7)
LESIZE, all, , , 4, , 1 !stubovi, sirina meandra

alls
lsel,none
*do, i,7,16,2
lsel,a,loc,z,(_b(i)+_b(i+1))*0.5
*enddo
lsel,u,loc,x,_a(4),_a(7)
LESIZE, all, , , 2, , 1 !stubovi, sirina prema spolja

alls
lsel,r,loc,z,(_b(6)+_b(7))*0.5
LESIZE, all, , , 3, , 1
lsel,r,loc,x,_a(1),_a(3)
LESIZE, all, , , 1, , 1 !izmedju prvog polu-stuba i stuba

alls
lsel,r,loc,z,(_b(16)+_b(17))*0.5
LESIZE, all, , , 3, , 1
lsel,r,loc,x,_a(8),_a(10)
LESIZE, all, , , 1, , 1 !izmedju drugog polu-stuba i stuba

alls
lsel,none
*do, i,8,17,4
lsel,a,loc,z,(_b(i)+_b(i+1))*0.5
*enddo
LESIZE, all, , , 3, , 1
lsel,r,loc,x,_a(8),_a(10)
LESIZE, all, , , 1, , 1 !izmedju stubova prvi

alls
lsel,none
*do, i,10,15,4
lsel,a,loc,z,(_b(i)+_b(i+1))*0.5
*enddo
LESIZE, all, , , 3, , 1
lsel,r,loc,x,_a(1),_a(3)
LESIZE, all, , , 1, , 1 !izmedju stubova drugi

alls
*do, i,8,17,4
lsel,u,loc,z,_b(i)
lsel,u,loc,z,_b(i+1)
*enddo
lsel,r,loc,x,(_a(3)+_a(4))*0.5
LESIZE, all, , , 2, , 1 !desna strana coskovi stubova,
alls
*do, i,6,15,4
lsel,u,loc,z,_b(i)
lsel,u,loc,z,_b(i+1)
*enddo
lsel,r,loc,x,(_a(7)+_a(8))*0.5
LESIZE, all, , , 2, , 1 !lijeva strana coskovi stubova,

alls
lsel,r,loc,z,(_b(5)+_b(6))*0.5
lsel,r,loc,x,_a(1),_a(5)
LESIZE, all, , , 1, , 1 ! cosak prvog polustuba-linija

alls
lsel,r,loc,z,(_b(17)+_b(18))*0.5
lsel,r,loc,x,_a(6),_a(10)
LESIZE, all, , , 1, , 1 ! cosak drugog polustuba-linija
alls
lsel,r,loc,x,(_a(5)+_a(6))*0.5
lsel,r,loc,z,_b(6),_b(17)
LESIZE, all, , , 1, , 1 ! izmedju coskova polustub-linija
alls

! izvlacenje trodimenzionalnog modela
alls
MSHKEY, 1
/pnum,mat,1
/number,1
extopt,on
type,11
cmsel,s,oko_trake
AATT, 1, , 11, 0
cmsel,s,traka
AATT, 2, , 11, 0
alls
amesh,all

type,1
esize,,1 ! jedan normal HF120 elemenat za debljinu bakra(debljina linije)
alls
vext,all,,,0,cu,0
alls
vsel,s,mat,,1
vclear,all
vatt,1,,1,0
vsel,u,loc,z,_b(2),_b(21)
vatt,1,,2,0
alls
vsel,s,mat,,2
vclear,all
vatt,2,,1,0
vsel,u,loc,z,_b(2),_b(21)
vatt,2,,2,0

alls
aclear,all
type,1
mat,3
esize,,4 ! cetiri normal HF120 elementa za debljinu SiO2
asel,s,loc,y,0
vext,all,,,0,sio2,0
alls
vsel,s,loc,y,0,sio2
vatt,3,,1,0
vsel,u,loc,z,_b(2),_b(21)
vatt,3,,2,0

alls
type,1
mat,4
esize,,7 ! 7 normal HF120 elementa za debljinu Si
asel,s,loc,y,sio2
vext,all,,,0,si,0
alls
vsel,s,loc,y,sio2,si
vatt,4,,1,0
vsel,u,loc,z,_b(2),_b(21)
vatt,4,,2,0









alls
type,1
mat,1
esize,,10 ! 10 normal HF120 elementa za debljinu vazduh
asel,s,loc,y,cu
vext,all,,,0,vazd,0
alls
vsel,s,loc,y,cu,vazd
vatt,1,,1,0
vsel,u,loc,z,_b(2),_b(21)
vatt,1,,2,0
alls
AATT, 1, , 11, 0
aclear,all

lsel,r,loc,y,1,7
LESIZE, all, , , 1, , 1 ! po debljini bakra
alls
lsel,r,loc,y,-1,-4
LESIZE, all, , , 4, , 1 ! po debljini SiO2
alls
lsel,r,loc,y,9,1990
LESIZE, all, , , 10, , 1 ! po debljini vazd
alls
lsel,r,loc,y,-6,-390
LESIZE, all, , , 7, , 1 ! po debljini silicijuma
alls
vmesh,all

! --- PEC spoljnje povrsine
alls
asel,r,ext
da,all,ax,0.
alls
! --- SHLD granicni uslovi za Cu i Si bez povrs. poprec. Preseka ---
vsel,s,mat,,2
asel,r,ext
asel,r,loc,z,-8e-3,8.7e-3
cm,cu_plast,area
SFA, all, 1, shld, 121.213, 1
alls
vsel,s,mat,,4
asel,r,ext
asel,r,loc,z,-8e-3,8.7e-3
cm,si_plast,area
SFA, all, 1, shld, 0.05, 1

! --- pobudna struja u Z=-120 ---
asel,s,loc,z,_b(3)
asel,r,loc,x,_a(5),_a(6)
asel,r,loc,y,si+sio2,0
bfa,all,js,0,1,0,-1
alls
! --- transmission line port --- KOLIKA TREBA DA JE IMPEDANSA
hfport,1,TLINE,,v1,,50 ! impedansa je ostavljena na 50 oma sto je podrazumjevana vrijed
asel,s,loc,z,_b(4)
bfa,all,port,1
hfport,2,TLINE,,v2,,50
asel,s,loc,z,_b(19)
bfa,all,port,2
scal=1e-6
vlscale,all,,,scal,scal,scal,,,1
! --- naponske putanje ---
z1=scal*_b(4)
xv1=scal*0.5*(_a(5)+_a(6))
yv1=scal*(si+sio2)
yv2=8e-6
nv11=node(xv1,yv1,z1)
nv12=node(xv1,yv2,z1)
path,v1,2
ppath,1,nv11
ppath,2,nv12
z2=scal*_b(19)
nv21=node(xv1,yv1,z2)
nv22=node(xv1,yv2,z2)
path,v2,2
ppath,1,nv21
ppath,2,nv22
pasave,all
alls
vclear,all
vmesh,all
sbctran
save
fini

! --- rjesavanje ---
/solu
spswp,1.e9,5e9,5.e8,1,,1,2
fini