Hi all
We have a parylene coating system and as of late we have seen a steady downward trend in our coating thickness, we should be running at about 1.1um to 1.3um on our parts but we are seeing below 1.0um
we have had a number of small leaks in the system which have been fixed, we still get a leak rate of about 0.012 ub/s and a base vacuum of 0.020 ubs with nothing in the chamber.
Just wondering if anyone has had the same type of problems or if someone has a kind of cheat sheet with known issues.
one thing I do know is cleanliness is next to godliness when it comes to Parylene coating.
Also has anyone done any work into re-absorption rates of materials after they have been de-gassed.
Many Thanks
Phil
We have a parylene coating system and as of late we have seen a steady downward trend in our coating thickness, we should be running at about 1.1um to 1.3um on our parts but we are seeing below 1.0um
we have had a number of small leaks in the system which have been fixed, we still get a leak rate of about 0.012 ub/s and a base vacuum of 0.020 ubs with nothing in the chamber.
Just wondering if anyone has had the same type of problems or if someone has a kind of cheat sheet with known issues.
one thing I do know is cleanliness is next to godliness when it comes to Parylene coating.
Also has anyone done any work into re-absorption rates of materials after they have been de-gassed.
Many Thanks
Phil
