most newer heatpumps, chillers and boilers are tested and approved for variable primary flow and the manufacturer can tell what minimum flow is. There isn't a very same chiller that has variable flow as a " 20% upcharge option". so you can't compare apples to apples... if 2 chiller models cost different and the one is variable flow approved and the other isn't, chances are there are other differences as well responsible for the price difference.
I don't know every device availabe, my statement is just based on the ones I deal with, but for those there isn't n option. My experience very small devices (i.e. boilers under 750,000 btu/h) are designed for primary/secondary flow (you can do varaiable primary, but it gets complicated), the larger devices are for variable primary flow by design and not as an option.
You also save on pump, piping, wiring and space by not having primary pumps. and unless you lead/lag each primary pump, overall pump reliability will be higher with variable primary flow.