Electrical Design for Clean Room

[buddy91082]

Does anyone know of a design guideline document for designing electrical systems for clean rooms?

Thanks.
b

 

[davidbeach]

I doubt there is one. Clean rooms can have many very different requirements.

 

[BJC]

Intel had one- i am sure they still do but it's secret and you would have to steal it.
Try googling under HVAC.
Installation in the plentum floor is cover in the NEC to some extent. Installation details are based on experience.

 

[rancam]

As the other posts say, it all depends what equipment is actually located within the room. Also what type of clean room? Bio-tech process or semi-conductor manufacturing type construction? What information are you specifically looking for? For pharma/biotech we generally use stainless steel nema 4x cabinets, pvc coated rigid steel conduits for general areas. You want to make sure you know where the electrical hazard classified areas are.

rancam