how to implement damping; transient dynamic of a mems cantilever beam

[vinny31]

hi
i am new user to ansys but not to FE in general. i wish to implement damping on a mems cantilever beam. Its a transient dymnamic analysis. I was looking at using the Alphad and Bethad input commands. However i am unsure what values to use on the mems scale. The two beams i am looking at are Aluminium and Silicon dioxide material. The beam is about 60 microns long, 5.5 microns wide and .35 microns thick.
Can anyone suggest a tutorial to look at or a place to start?

 

[Drej]

You need to find the frequencies you want to damp (easy) and then obtain the damping that your system exhibits (not easy). Do a modal analysis for the former and either carry out some testing (ideally) or refer to previous tests/the internet for "typical" damping values of your system (if there's such a thing) for the latter.


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