Looking for thin sensor for detecting silicon wafers

[JubilationTCornpone]

Hello, all. I'm looking for a very thin sensor that I can use for detecting silicon wafers. It is to be used in a robotic end-effector for the semiconductor industry.

I had previously planned on using a thin capacitive sensor which was to be offered by a certain vendor. Since then, I've been told that this sensor might not be offered after all, so I need to start looking for alternatives.

Help?

 

[nbucska]

Can U use pneumatic sensor ? <nbucska@pcperipherals.com>

 

[JubilationTCornpone]

If you mean a vacuum sensor, then no, it's out of the question. We're not using vacuum to grip the wafers. Rather, we're using a mechanical fixture.

 

[xnuke]

Optical sensors work pretty well. I've seen both interrupter and reflector types used to detect wafer presence.

 

[JubilationTCornpone]

We tried an optical sensor, and it worked quite well. Unfortunately, we can't use it due to intellectual property concerns. (For pity's sake!)

 

[gaju]

Hi,
if you can search for schnieder electric then you can use there capacitor sensors. they are available in bidirection
Regards

 

[Foxfur]

I used Omron sensors in the wafer plating stations I designed and built. SX-670a PMS w/built in amp for spindle speed. For your app, I'd recommend EE-SB5(non-amp), or EE-SPY301/401 series(amp). These are optical though, I am not sure what the IP problem is with using commonly available opto-sensors/photomicrosensors. Omron has a mind-blowing array of cap sensors, as does Sick, Turck, CD, Schlumberg, SAIA, Optix, Automationdirect.com, etc. There has got to be one out there for you.
Good luck,
Email, or preferably post, with further questions,
Foxfur