Hagan
Mechanical
- Jul 27, 2001
- 12
Hi Guys
I am looking for information on silicon wafer and other semi-conductor processing equipment. Specifically, I am interested in contamination issues. I need to know the degree of purity and cleanliness needed at various stages of production. Also, what materials can be used in construction of process equipment where DI water is used as a cleaner or cutting fluid.
Example: a grinding machine being used to back-grind the wafers after the devices are installed. DI water (assume high purity) is used as a coolant. What materials should I avoid? Obviously metals that are prone to corrosion such as iron but what others? Is aluminum, brass, nickel etc a contamination risk in this industry?
Is the concern with the wafer purity (I know they go through a cleaning process after grinding) or is it a matter of contaminating a centralised "shop" supply of high purity water?
An internet search provided conflicting information particularly regarding the compatibility of aluminum and brass.
If I was designing the above mentioned machine, what materials, plating processes, rust proofing techniques could I use?
All advice is much appreciated
Rich
I am looking for information on silicon wafer and other semi-conductor processing equipment. Specifically, I am interested in contamination issues. I need to know the degree of purity and cleanliness needed at various stages of production. Also, what materials can be used in construction of process equipment where DI water is used as a cleaner or cutting fluid.
Example: a grinding machine being used to back-grind the wafers after the devices are installed. DI water (assume high purity) is used as a coolant. What materials should I avoid? Obviously metals that are prone to corrosion such as iron but what others? Is aluminum, brass, nickel etc a contamination risk in this industry?
Is the concern with the wafer purity (I know they go through a cleaning process after grinding) or is it a matter of contaminating a centralised "shop" supply of high purity water?
An internet search provided conflicting information particularly regarding the compatibility of aluminum and brass.
If I was designing the above mentioned machine, what materials, plating processes, rust proofing techniques could I use?
All advice is much appreciated
Rich
