plasma heat load relationship

[rx7rider]

i have an aluminum plate facing a 3kw plasma source. how can i translate that 3kw plasma source into some sort of heat flux/load so that i can do a thermal model of the plate?

 

[itsmoked]

For starters are you discussing only radiant heating effects?

Keith Cress
Flamin Systems, Inc.-

http://www.flaminsystems.com

 

[rx7rider]

radiation and convection i would assume.

 

[IRstuff]

What pressure is the plasma formed at? Low pressure conditions have little in the way of convection.

TTFN

 

[rx7rider]

the assembly is in vacuum. there is an inert gas flowing through the generator and onto the plate. when its a 3kw generator, would it also be a 3kw heat load onto the plate?

 

[IRstuff]

Vacuum means essentially no convection. You need a fluid, or gas, heat transport for that.

In any case, I would then suggest that you look at competitor's systems to determine whether the heat load is a issue or not.

Small plasma reactors that hold 1 lot of wafers are completely devoid of any heat exchanging in the chambers.

TTFN

 

[rx7rider]

there is definitely a heat load. and yes, there is inert gas flowing through the rf generator and into the chamber. therefore the plate in the chamber is exposed to the plasma and thus being heated.