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Reference plane

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Fel37mb

Electrical
May 8, 2003
1
Hello,
I need some clarity about reference plane for on-wafer calibration & measurement using VNA and probe Station. Can you please tell me what determines the reference plane, how to define it and does it have to do with the dimensions of DUT and calibration artifacts.

Thanks

Felix
 
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The reference plan is specified by the dimensions of you calibration standarts. On waver i think you'll use TRL or some of it's derivates. Here the middle of the THRU standart specifies your reference plan. There is the option to specify the reference plan with the REFLECT standart, but i think this is unusual. So the line from the probes to the DUT should contain your line length of the reference plan. You can find a lot if information about this topic in application notes of VNA manufacturers like Agilent or Rhode&Schwarz. Also you can visit and visit your prefered library ;-)
 
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