Dec 27, 2007 #1 dalnim Materials Aug 20, 2007 2 0 0 KR Does anyone know suppliers info for wet etch chucks for MEMS? I'd like to know what companies are supplying chucks that protect one side of a wafer from the chemical during wet processes(such as acid or alkali solutions). Thanks, dalnim
Does anyone know suppliers info for wet etch chucks for MEMS? I'd like to know what companies are supplying chucks that protect one side of a wafer from the chemical during wet processes(such as acid or alkali solutions). Thanks, dalnim
Dec 27, 2007 #2 IRstuff Aerospace Jun 3, 2002 44,376 5 38 US Usually, you have an oxide for etch protection. The backside of a wafer is too rough to seal against a chuck for etch resistance. TTFN FAQ731-376 Upvote 0 Downvote
Usually, you have an oxide for etch protection. The backside of a wafer is too rough to seal against a chuck for etch resistance. TTFN FAQ731-376