Suppliers for wet etch chucks for MEMS?

[dalnim]

Does anyone know suppliers info for wet etch chucks for MEMS?
I'd like to know what companies are supplying chucks that protect one side of a wafer from the chemical during wet processes(such as acid or alkali solutions).

Thanks,
dalnim

 

[IRstuff]

Usually, you have an oxide for etch protection. The backside of a wafer is too rough to seal against a chuck for etch resistance.

TTFN

FAQ731-376