Vacuum Heat what type of Graphite?

[mfgenggear]

I need to design a graphite fixture.

I see there is several diffrent grades of graphite
Please advise which grade should be used.
it of course needs to be flat.

not sure what grades can be run in a vacuum furnace.

Thanks for you help in advance.

 

[IRstuff]

Why not go ask semiconductor processing equipment suppliers?

TTFN

FAQ731-376

 

[unclesyd]

Here is a material, Pyrolytic Graphite, that we used for a vacuum metalizizng process.

http://www.advancedcarbon.com/pyrolytic.htm