matrixcvd
Materials
- Jan 15, 2009
- 1
Normally i used SS welded fittings for vacuum process chambers for port access and gas thruput. I have been recently asked if i could forgo welded ports and go with taped PTFE or Teflon pipe tape NPT ports for gases.
has anyone used NPT Teflon lined threaded connections for process gas input on CVD vacuum chambers for pressures around 10E-4 torr and corrosive gases such as BCl3 and HCl in CVD vacuum chamber.
has anyone used NPT Teflon lined threaded connections for process gas input on CVD vacuum chambers for pressures around 10E-4 torr and corrosive gases such as BCl3 and HCl in CVD vacuum chamber.
