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Wafer Surface condtion after Nitride Film Stripped

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HowardHiew

HowardHiew

Electrical
Nov 17, 2014
4
HI,

Is anybody know what is the wafer surface condition after nitdride film stripped?
Focus on 0100 P-Type test wafer.

Through continuous recycling, will the surface be more porous and causing some out gasing or particle came out?
 
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