Thanks metengr, this process is close to ATM pressure with total flows ~ 300-400slm for rapid deposition rate. And yes, the two posts are related, I'm looking into alternative options.
Holy crap, you guys rock! Typically we use 316L for these chambers. There are advantages to Inconel and Hastelloys from a corrosion standpoint, but the material availability and machining difficulty has prevented use in large chambers. From the information provided confirming casting...
I have a chamber used for semiconductor processing that is 316L and is exposed in the process to hot HCl gas. Periodically, the chamber has to be opened and water vapor adsorbs to the surfaces and corrosion sets in. Is there a coating that will protect the surfaces from corrosion without...
I have a complex semiconductor chamber I'd like to make from casting. The chamber has atomic hydrogen and HCl exposed to it's internal surfaces at 1100 C. Hydrogen embrittlement is not a problem for a chamber made from forged material, will it be a problem for a casting? Second question, in...
