Coatings (i.e. magnaplate)

[4RRS]

I have a chamber used for semiconductor processing that is 316L and is exposed in the process to hot HCl gas. Periodically, the chamber has to be opened and water vapor adsorbs to the surfaces and corrosion sets in. Is there a coating that will protect the surfaces from corrosion without contaminating the process? The process uses trichloralsilane and HCl above 1000C, the chamber is water cooled so surface temp is probably < 200C.

 

[metengr]

4RRS;
If this post is related to your other post, what is the internal pressure of this vessel?

 

[metengr]

You might want to take a look at this paper;

http://www.swagelok.com/downloads/webcatalogs/en/stainlessforsemiconductors.pdf

 

[4RRS]

Thanks metengr, this process is close to ATM pressure with total flows ~ 300-400slm for rapid deposition rate. And yes, the two posts are related, I'm looking into alternative options.

 

[metengr]

4RRS;
Look carefully at the ferritic stainless steel option in the paper attached to the previous response with the optional surface passivation.