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Does anyone where I can get a complete set of manuals for this type of robot?

A metal thickness film monitor is good if everyone adheres to it, because this isn't possible unless a Nazi regime is in control, I would prefere a sensor that I can integrate into my machine that would stop progress of any metal dep'd wafers?

My apologies, the information I am looking for is a sensor capable of detecting approx a 1000 angstrom layer of metal on a silicon wafer (and not detect a bare silicon wafer)as it enters the toolset before it enters an etching chamber, and etches the metal off the wafer which in turn destroys...

Yes they have eyes, paid enough to care-no any other intelligent suggestions??

Is there any sensors that will detect pre-sputtered wafers before they enter into a oxide etch chamber? (for the purpose of damage limitation to the etch process kit)