Apply Electrical Load on the MEMS Cantilever in ANSYS 15

[Eshaaaag]

Dear Engineers
Good Day
I have a research in MS.c (effect of the Electrode position on the dynamical behavior of electrostatically actuated cantilever MEMS resonators), I use the ANSYS 15 program to study the four parameters (displacement of the cantilever ,frequency response,velocity of oscillation and Quality Factor),I should apply Electrical LOADS to the surface of the cantilever to make Electrostatic actuation as a result of that the cantilever vibrate ,but the problem is:HOW can I apply The Electrical Loads on the cantilever in ANSYS ?? what the proper steps to doing that?? what the a procedure before applying Electrical Load ??? I spent more time to do that ,but I cant't.please could you help me??

thanks Alot
Mohamed Ahmed Eshag
Electrical and Instrumentation Engineer
eshag10@yahoo.com

 

[Eshaaaag]

this is a design of the cantilever

 

[mubii]

Hi,
You may use trans126 elements to model the electrostatic effect for the MEMS cantiliver. Select the nodes connected to the bottom surface of your cantilver and and group them with a name suppose "A". Following is the code if you have gap of 2 um between the cantilever and bottom plate and actuation voltage of 20 V.


ASEL,S, , ,P51X
NSLA,S,1
NPLOT
NPLOT
CM,A,NODE

EMTGEN,'A','EMTELM','G','UZ',2,0.3,0.8,0.8854E-05
ALLSEL
CMSEL,S,A,NODE
D,ALL,VOLT,0
IC,ALL,VOLT,0
ALLSEL
CMSEL,S,G,NODE
D,ALL,UX,0
D,ALL,UY,0
D,ALL,UZ,0
D,ALL,VOLT,0
IC,ALL,VOLT,0
ALLSEL
FINISH
/SOL
!*
ANTYPE,0
ANTYPE,0
NLGEOM,1
NSUBST,10,20,10
NEQIT,10
/STATUS,SOLU
SOLVE
ALLSEL
CMSEL,S,G,NODE
D,ALL,VOLT,20
ALLSEL
OUTRES,ALL,ALL
NEQIT,200
/STATUS,SOLU
SOLVE

 

[Eshaaaag]

Thanks alot MR.Mubii I did it Ok...nevertheless I need to obtain the displacement of deflection and frequency,I get some values from the post proc ,but I think it's so much values,please could you give me your support to how obtain actual values??

 

[Eshaaaag]

could you see the attached photo that show the values