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Chemical Mechanical Planarization (CMP) in Wafer Fabrication Semiconductor

O

oday25

Mechanical
Apr 2, 2025
1
Hi there, is anyone who familiar with CMP polisher equipments on troubleshooting, maintenance, consumables evaluation, startup etc... ?

Equipment models are AvantGaard 776 know as SpeedFam-IPEC & Applied Materials Mirra Mesa.
 
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