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I'm looking for a cable for 5KW RF Plasma power supply.

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MicSeven

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May 19, 2003
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I'm looking for a cable for 5KW RF Plasma power supply.
The used RF Plasma power supply is made by ENI Company.

I'm going to use the cable to connect the matching box and a moving electrode (not static state).

Is there any special consideration that I need to take care for the purpose?

Thank you very much

Best Regards

Jungo
 
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depends on how well maintain the plasma and your ignition sequence, and in part what your match box is designed for.

start with the power rating (continuous duty) probably at you source frequency.


 
This sounds like a difficult task. Between matchbox and load current and/or voltage are usually singificantly larger compared to the 50 Ohm connection from generator to matchbox and at 5 kW this already requires quite a bulky and quite rigid cable. I would at least consider to move the matchbox too.

Furthermore ENI as the supplier of the generator or the supplier of the matchbox should be able to support.
 
Dear hacksaw and electricuwe

Very Thanks for your kindly reply.

Maybe I'm goiing to try MKS Company (ENI power) if there is any suggetion for us.

Thank you very much again

Regards

Jungo
 
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