In Situ Particle Monitoring

[BrunoPuntzJones]

I work in vacuum coating, but not in the semiconductor industry. I'm hoping someone here may be able to help be out. I am looking for an in situ particle monitor for a vacumm system. The simplest of these system are a laser which traverses an opening. Particles pass through the opening and scatter the laser beam.

A bit of research shows that High Yield Technology (HYT) manufactured something exactly like what I want (HYT Model 10, Model 20, Model 25SX etc). But HYT has been bought so many times since then, I can't find information on who, if anyone stills makes that product. Inficon also makes a laser vacuum particle detector, called Stiletto. I have spoken with them about their system, but it's not exactly what I want, it is designed primarily to to go in pumping lines, I want a detect right in the chamber.

Are there other options out their I'm missing? What does the semiconductor industry use for in situ particle monitoring?

Thanks,
BrunoPuntzJones

 

[IRstuff]

Semi-new:

http://www.recycledgoods.com/22306_High Yield Technology_Model 15_Laser Particle Counter Probe.html

TTFN

FAQ731-376

 

[BrunoPuntzJones]

IRstuff,

Thanks for the link. I will look into getting a used HYT particle counter. Do you know, are they not manufactured anymore?

 

[IRstuff]

I don't know; I've not been involved in semiconductors for more tha 20 yrs. You might query that recycledgoods company.

TTFN

FAQ731-376

 

[BrunoPuntzJones]

FYI

Hach has stopped production of the HYT probes, but they are still supporting them. I have bought a used system, but I'd still be interested in hearing from people in semiconductor as too whether there is anything similar being made right now.