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Looking for thin (pref. capacitive) wafer sensor

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JubilationTCornpone

Electrical
Sep 17, 2001
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Hello, all. I'm looking for a very thin sensor that I can use for detecting silicon wafers. It is to be used in a robotic end-effector for the semiconductor industry.

I had previously planned on using a thin capacitive sensor which was to be offered by a certain vendor. Since then, I've been told that this sensor might not be offered after all, so I need to start looking for alternatives.

Help?
 
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Check out OMRON and Keyence for Wafer mapping
Pepperul Fulsch for wafer sensing.
Robot End affector for wafer normally uses vaccuum. Is this for edge grip applications ?
 
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