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Piezoresistive Pressure Sensor

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emily126

Structural
Mar 17, 2005
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HK
hi~

I am doing a piezoresistive pressure sensor with 4 resistors above the diaphragm so that a Wheatstone bridge is formed. As I'm only beginner in ANSYS, this job is quite hard to me. I have several questions to ask, I'll be grateful if you can help me.

(1) I would like to compare the voltage calculated by ANSYS and the theoretical voltage, but I lack the formula.
Where can I find it out? ( My model is a 3-D model and only the diaphragm with resistors part is in interest)

(2) Can I get the change of resistance in ANSYS?

(3) I know that for p-type Si used, the resistors should be aligned in <110>, so that maximun value is obtained. But I don't sure how to change the coordinate systm correctly in ANSYS.

Thanks!
 
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