Vacuum Pumping Systems

[Runt0312]

I'm trying to design a very basic load lock system and I'm trying to research possible vacuum accumulator sizes that I can pair with it.

Does anyone know of a source or cite that has information on vacuum accumulators or buffers?

Thanks in advance

 

[Apakrat]

A little looking around various links at

http://www.hydraulicspneumatics.com/200/TechZone/Accumulators/87

may reveal Your needs.


At 74th year working on IR-One2 PhD from UHK - - -