chemical solution to remove Cr or Cr2O3 on silicon wafer surface

[gettering]

Hi,

I'm looking for chemical solution to remove Cr or Cr2O3 on silicon wafer selectively. I just tried using HF to remove it, but it didn't work well. Could you recommend me some chemical solution?

Thank you.

YK

 

[lattar]

I would try some oxidizing solution like hypochlorite or hydrogen peroxide to oxidate chromium to soluble chromium(VI) compounds.
Hope this will inspire some new ideas for you.